• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Method for measuring force and variables derived therefrom, such as pressure, torque, acceleration or weight, and sensor based on this method. The invention relates to a method in which at least two oppositely arranged magnets are in force due to the interaction of the magnetic fields on each other. Against this force effect acts a mechanically applied force such that the magnetic force is compensated. Thus, the mechanical force due to the linear dependence of the magnetic field strength of the air gap between the oppositely disposed magnet via a magnetic field strength sensor leads to a clear electrical output signal. A suitable sensor is preferably a Hall sensor or a GMR sensor. When changing the ambient temperature, the magnetic effect changes, thereby changing the distance in the power balance case. However, the measured magnetic field strength again corresponds to the amplitude of the mechanical counterforce. This results in a very low temperature dependence. The temperature can also be determined by calibrating the distance ratios as an additional output signal also based on a distance detection.
    公开号:AT512463A2
    申请号:T501002013
    申请日:2013-02-08
    公开日:2013-08-15
    发明作者:
    申请人:Faculty of Electrical Engineering University of Ljubljana；
    IPC主号:
    专利说明:

    The invention relates to a method and a device for force detection
    By suitable arrangement of magnets and magnetic field sensors, as well as by the evaluation of the imposed forces in the case of equilibrium by means of field measurement, this invention provides for many force sensing applications a practical alternative to conventional methods, for example to piezoelectric sensors.
    State of the art
    There are various applications in the literature which use magnets in combination in repulsive or attractive direction of action and use either inductive sensors, magnetic field dependent resistors or Hall sensors to obtain information about the relative movement of the sensor element within the magnetic field or about the relative movement of the magnets to each other:
    The patent US 6670805 discloses a distance sensor which detects the position of two magnets relative to an embedded magnetic sensor. Either one magnet is changed in relation to the other in its distance, or the relative position of the sensor is changed within a constant gap. The inventor of this device uses two magnets and a sensor. The magnets are axially N-S repulsively aligned. Some features are similar to those in the presented invention. A named spring serves only as supportive
    StL08.
    Element not to fall below a minimum distance between the magnets. The repulsive force increases the distance between the magnets. The distance from each other is measured. The range of motion is limited by a stopper. This serves the maximum distance, which is caused by the repulsive forces of the magnets to pretend. The minimum distance that is achieved by supplied acceleration of the magnet is limited by a spring on the other side. Force is required to move the moving part against the magnetic field. The relative position of the magnets to each other reflects the required force required to maintain the position against the spring and against the force due to the magnetic field (balance). Consequently, the distance is also an indicator of the applied force. This system measures a distance in a nonlinear transfer function and with high
    Temperature dependence. Additional effort is required for linearization and temperature dependency compensation.
    The utility model DE 8120655 U shows a pressure sensor. In this example, the sensor is moved within a pair of magnets. The sensor is arranged on a membrane whose deflections are measured. The second magnet may be changed in position to adjust the transfer characteristic. The distance between the magnets remains
    StL08. unchanged and there is no detection of a magnetic movement.
    The impact sensor in Patent JP2218965 shows an arrangement of a Hall sensor and magnets.
    In the impact detecting sensor in US5723789, a magnet in a movable arrangement is sensed by a coil.
    German publication DE3809887 (a sensor for mechanical movement detection) shows a further sensor magnet arrangement. In particular, FIGS. 4a and 4b show a magnet-dependent resistance sensor arranged in the vicinity of a gap between two magnets.
    Object of the invention
    The presented invention is intended to be a suitable alternative to common piezo sensor based force gauges.
    A skilled sensor-magnet assembly has been sought that is capable of measuring force or pressure and has low temperature dependence and high linearity. This arrangement should require little to no calibration, correction or Signal conditioning effort, with a recognized and proven linear dependence ratio of a transfer function should be used. The method and the device for carrying out this method should operate in a one-step targeted manner and do not require two or more steps as in known methods, as in the example of a modification of the
    StL08.
    Distance by applying a force against a non-magnetic counterforce to then convert the force-dependent distance measurement signal of a magnetic field sensor with respect to a magnet in the force signal. While known sensors usually detect in a first step, the movement of a magnet against a spring, whereby the force can be calculated in a second step due to the known ratio of the spring deformation and the associated distance between the sensor and magnet or between two magnets, allows proposed sensor to detect that magnetic field having a linear relationship to the repulsive or alternatively to the attractive counterforce, a force which is directly proportional to the field strength. The goal is to define a system in which the force change directly changes the magnetic field strength at the circuit. Solution of the task
    According to the invention, the problem is solved by a method which has the task of measuring force or derived variables, such as pressure, torque, acceleration or weight.
    For this purpose, at least two permanent magnets are arranged in pairs in accordance with similar known arrangements in such a way that they are movable in a preferred direction relative to each other. This direction corresponds to at least one vector component of the magnetic force acting between the permanent magnets and the distance dependent force. Ideally, it is in
    StL08.
    Essentially the main direction of the force effect or, correspondingly, the main direction of the force due to the derived size. This creates a gap between each pair of magnets, the size of which depends on the ratio of force and magnetic counterforce. According to the invention, at least one of the permanent magnets of each permanent magnet pair is converted by the counteracting force to be measured or oppositely acting magnitude derived therefrom, changing that gap relative to the associated second magnet of the permanent magnet pair, for which the sum of the magnetic forces acting through the permanent magnet pairs and the mechanically applied opposing forces or variables derived therefrom in the direction of mobility I will be zero. The dependent of the measured variable magnetic field strength is detected by at least one magnetic field sensor within each formed and conditioned by this method gap as a directly proportional size and the sensor in the output signal for the quantity to be measured as an electrical signal in a suitable signal processing, output - And / or display device passed.
    In order to carry out the method, a device according to the invention is furthermore presented which has at least one pair of permanent magnets whose magnets are arranged at a distance from one another and whose magnetic pole faces are at least approximately parallel to one another and in one
    StL08:
    Orientierungslage are in which act the greatest attraction forces between the permanent magnets. For this purpose, a distancing device for maintaining a minimum distance between the pole faces in at least one embodiment from the group spacer plate, spacer sleeve, hollow guide with at least one inner nose, a distance spring preferably a leaf, a cone, a plate, membrane, Evolut-, or helical spring disposed and a magnetic field sensor between the opposing magnetic pole faces whose electrical output signal is influenced by the magnetic fields of the magnets.
    On the other hand, it is advantageous if such a device has at least one pair of permanent magnets whose magnets are arranged at a distance from one another and whose magnetic pole faces are held at least approximately parallel to each other by guiding and limiting means and are in an orientation position in which the greatest repulsive forces act between the permanent magnets. It is also provided in this embodiment that a magnetic field sensor is arranged between the mutually opposing magnetic pole faces, and that a device for counter-force application is preferably in the form of a lever or a hydraulic or pneumatic pressure chamber on at least one permanent magnet.
    In such devices, it is particularly advantageous if the magnetic field sensor as
    StL08.
    Integrated circuit is designed, preferably with at least one Hall sensor, or at least one magnetfeldabhängigem resistor preferably made of bismuth or a GMR (giant magnetoresistor) structure and preferably formed together with an evaluation circuit.
    For this purpose, it is advantageous if the magnets and the integrated circuit are housed in a housing by the integrated circuit of at least one pair of permanent magnets is embedded, and if at least one connection interface is provided on the housing for the device for applying the counterforce.
    Advantageously, the magnets can be designed as surface mountings on micromechanical structures (MEMS) and can be arranged above and below the integrated circuit. For this purpose, the magnetic pole faces are larger than the magnetic field sensors and should have a maximum extension of 5 mm, preferably of at most 1 mm. Ideally, the extent of the pole faces is in the range of 10 pm to 100 pm. It is advantageous if the device has at least two pole pairs of at least three permanent magnets which exert the magnetic forces in the opposite effective direction, for example a magnet centrally attracts two external magnets.
    StL08.
    In some applications, it is advantageous if such a device according to the invention is a component of a two-dimensional or three-dimensional sensor matrix.
    The invention will be explained with reference to subsequent embodiments. Show it:
    Pig.l shows the basic arrangement 100 of two permanent magnets 101,102 and a magnetic field sensor 103. In this case repulsion acts due to the magnetic orientation against a force applied over the outside of the two magnets compression force 107, whereby the one magnet in the direction 106 in a balanced position 104 with respect to the surface of the sensor. The minimum distance is defined as the difference of the maximum distance 104 from the front of the movable magnet to the top of the sensor minus the maximum allowed range 105 for the travel.
    Fig. 2 shows the non-linear characteristic of the magnetic force dependence Fa (decrease) from the distance x within the range x "to x___ between the pole faces with the same
    Polarity in an arrangement as Fig.l shows. Fig. 2a shows the result of measuring a first prototype with certain dimensions. This served to prove the mode of action, with two AlNiCo cylinder magnets with a height of 1mm and
    StL08. a diameter of 3 mm have been used. The induced force repulsion was measured mechanically and the associated magnetic field was detected by integrated Hall sensors. The sensor was fixed about 1 mm above the one magnet. The second movably mounted magnet was moved to the opposite at a distance of 0.5 to 4.5 mm to the sensor. Here, the minimum distance of the effective sensor surface in a housing to the outer surface of the housing was 0.5 mm.
    3 and 3a show the characteristics of
    Magnetic field sensor output signals showing linearly decreasing dependencies of force equilibrium within the limits of measurement Fadß and F **. The external compression forces and the magnetic repulsive forces are in equilibrium as shown in Fig.l. Fig. 3a reflects the data for the prototype arrangement as presented in the description of Fig. 2a.
    4 shows the nonlinear signal out of the sensor as a function of the balanced distance position x of the magnets at equilibrium of forces corresponding to the arrangement as in FIG. 1 within the measuring range from x 1 to x 4. FIG. 4 a again shows the measured results with the prototype arrangement described above.
    StL08
    5 shows the second basic arrangement 200 of two permanent magnets 201,202 with a magnetic field sensor 203. In this case attraction acts due to the magnet orientation against at least on the outside of at least one magnet acting tensile force 207, whereby the magnet in the direction 206 in a balanced position 204th is brought relative to the sensor surface. The maximum distance 205 is fixed, in which case the sensor signal gives a minimum value of the system.
    FIG. 6 shows the non-linear characteristic of the magnetic force dependency FÄ in decreasing dependence on the distance x between the magnetically differently oriented pole regions corresponding to FIG.
    Figure 7 shows the linearly increasing characteristic curve as an output signal of the magnetic field sensor as a function of the equilibrium of forces within the limits Fund F ^ *, wherein the externally acting suction or tensile forces and the magnetic attractive force Ftt are in equilibrium.
    Fig. 8 illustrates the resulting non-linear signal out of the sensor as a function of the balanced position x of the magnets at equilibrium of forces within the measuring range from x ^ n to x * ". qtT.nft
    Figures 7a, 7a and 8a show the corresponding prototype measurement results obtained in the AlNiCo cylinder magnet prototype with the dimensions: 3 mm diameter and 1 mm height and with an integrated Hall sensor circuit corresponding to the arrangement of Figure 5. In this case, the characteristics agree in principle with the assumptions or simulation data corresponding to the figures in FIGS. 6, 7 and 8. However, the invention is not limited to this embodiment.
    FIGS. 9, 9a each show a rough one
    Sketch of an integrated force sensor in two different positions of the magnets in a repelling arrangement.
    10, 10a show a rough sketch of an integrated force sensor, namely in two different positions of the magnets in an attracting arrangement.
    Comparing the two different arrangements shown in Fig.l and Fig.5 gives different aspects.
    The magnets can each have different basic shape, preferably they are cubic, cylindrical {disc-shaped} or cubic or cuboid. Material, dimensioning and shaping depend on the measuring range to be measured (for the force or the pressure or the variables derived therefrom)
    StL08.
    Measurement environment and the desired housing shape (also design). The preferred shape for the magnets is cylindrical. Symmetry in the magnetic shaping is not necessary. Favorable in an application with attractive magnetic force effect (see Fig.5) proves the self-alignment behavior.
    In the vicinity of a magnetic measuring system, magnetic and metallic material, in particular magnetizable material, can cause an error. However, since the sensor is embedded between magnets located very close, magnetic or metallic objects in the comparatively greater distance have a negligible effect, provided that the smallest signal output within the measuring path range is still large in comparison to that signal generated by the Disturbance variables could be generated. Field distortions should also be lower so that the error becomes smaller than the maximum permissible error.
    Since the magnets 101, 102 in FIG. 1 are arranged in mutually repelling orientation with respect to each other, the magnetic field causes forces and torque on the freely movable magnet 101 when the other magnet 102 is considered to be fixed to the environment. These forces or these torques could bring the magnet 101 into an attractive position for the other magnet, or at least into a position outside the symmetry axis. A mechanical guide should be such a
    StL08.
    Prevent behavior. The arrangement in Fig.l should therefore be introduced into a housing, which may result in new forces due to friction. By suitable surface pairing friction can be avoided or greatly reduced. Air or gas within the gap requires drain or inflow paths so as not to be compressed or stretched as the measurement cycles occur in rapid succession. The arrangement according to FIG. 1 is suitable for forces or quantities derived therefrom which press against the surface, such as gas pressure in a piston pump, or for a balance using gravitation G = m * g, where m is a small mass of definite size and g the gravitational constant is.
    Another application could be a touch-sensitive surface, such as in a tactile sensor of a robotic finger. Note: Higher forces in Fig.l cause smaller output signals at the sensor as lower forces: out = Kio - Kn x, where Ki0 and Kn are material- and shape-dependent constants.
    The arrangement of Figure 5 has the advantage of self-alignment, self-centering. The magnets tend to reach the position of least potential energy. In this case, the magnets must be pulled apart, against the attraction of the magnets. In principle, one of the magnets 201, 202 could also be replaced by an attractable material, such as iron, copper or other ferromagnetic material.
    StL08;
    The magnetic arrangement with attractive force between the magnets is suitable for vacuum sensors, vacuum sensors or fluid flow meter. If a holder is attached to the moving magnet, a lever, or a wheel, also allows the forces to be diverted to be redirected in a different direction. Differently long lever arms, measured from the axis of rotation of the lever, could also change the path-to-power ratio towards another gear ratio.
    Note: Higher force in the configuration of Fig. 5 causes a larger output than smaller force: out = K2o + K2i * x, where K2o and K2i are constants depending on material and shape.
    A great advantage of the configuration in Fig. 5 compared to that of Fig. 1 is that in Fig. 5 guiding devices are not required to prevent the magnets from drifting from their optimum position due to lateral forces. But the disadvantage is the instability of the balance.
    If the attracting magnets are too close to each other and the measuring force too low to achieve complete compensation, then the movable magnet is inevitably attracted to the closest possible position. However, if the distance is too great to achieve the counteracting effect of the magnetic forces, then the magnet could be immediately pulled into the maximum removal position by the external force, far from the equilibrium position of the forces.
    StL08
    To avoid this disadvantage, a tricky method has been found, wherein springs are used, which prevent the drifting of the magnet from the attraction area or the drifting to the corresponding magnet.
    A spring is either compressed or stretched apart by the magnetic attraction force. This creates a balance spring force magnetic force, the spring force is equal to the force of attraction, but in opposite direction of action. Then the force to be measured is added, which in addition acts against the spring force: F + Fni = Fspring · The spring force FSpring represents a linear function for the path change. The result for the force F Fspring compressed Em kspring ^ cotnpresseci (li-d) - Fm or F - Fspring ^ eXpar, ded - Fm k < sprjng_expanded " d - Fm, where
    FsPring_compressed is the spring force in the compressed state, Fm is the magnetic force at this point and F represents the sought force component.
    The arrangements in FIGS. 9, 9a, 10 and 10a show two magnets 1, 2 with the pole orientation N (north), S (south). The sensor (here an integrated Hall sensor) 3 is located in the middle of an integrated circuit 9, which is preferably produced by a silicon semiconductor process. The magnet 1 is here positioned by a fixing plate 11 with a recess for the magnet. The magnet must be placed just below the sensor 3. A seal 16 may serve as protection for the circuit 9 with the
    StLOÖ. 16
    LMFE
    Be provided sensor element. This seal may be an epoxy such as SU-8 and may even cover the bond wires 12. The seal causes a minimum distance to the sensor. The minimum distance between the magnets 1, 2 is further increased by a Distanzieril 19, which may be a sponge or a flexible damping material. The housing 10 of the integrated circuit 9 and the micromechanical system consisting of the magnets and a membrane 6 together with the membrane holder 20 form two chambers 7 and 8. These can communicate directly with a gas environment of different gas pressure.
    In order to apply gas pressure differences, two connecting pipes 4 and 17 can be docked, gas could be passed through pipe 4 or the path 18. The electrical signals for the supply of the sensor and the lead-out of the sensor signals are connected via bonding wires 12 to the connection legs 13 on the housing. Depending on the orientation of the magnets to one another, either attractive or repulsive magnetic force 14 results. In equilibrium, the magnetic force 14 is equal to the applied mechanical force 15. By using, for example, a piston 5, force can be transmitted to a movable magnet. Also, a lever can be used to turn the direction of force.
    The arrangements in Fig. 9 and Fig. 9a are in stable equilibrium. That's it
    StL08AT shows that the force vectors go along with different distances of the magnets in the same change. Greater distance causes smaller repulsive forces, smaller distance causes greater repulsive forces. The tube 4 allows a guide together with the piston therein, so that lateral forces are prevented on the repelled magnet.
    The arrangements in the form of FIGS. 10 and 10a are equilibrium-unstable. To improve stability, a spring must be installed. Then the external force must additionally act against the spring force. The external force is supported by the magnetic force. The thus determined measuring signal at the sensor then serves to determine the measured value.
    One possible embodiment of the spring could be a diaphragm, wherein the piston 5 must act against the increasing force. At maximum force, the attraction of the magnets reduces the linear spring force increase in the diaphragm. The output signal of the sensor must be corrected by the membrane portion. The transfer function of the diaphragm displacement relative to the force can either have exactly known behavior or can be measured once and stored for calibration in the integrated circuit. Instead of a membrane, other springs can also be used as stabilizing elements. By adding springs with defined forces in designs according to FIGS. 10, 10a, this example can still be stabilized. In this case, the forces are different in the
    StL08.
    Size as indicated in the sketched arrows (vectors).
    Note: The piston and the lever do not need to be used when gas pressure is used instead of mechanical forces. The examples shown here are not intended to limit the number of possible applications related to the invention.
    Any change in temperature would affect the equilibrium to give another distance x. The associated magnetic field strength due to this change in distance but also changes in the opposite way. Higher temperature causes lower field strength. For a given force to compress the repelling magnets, a smaller distance results, but the sensor shows the same value as the temperature increases. In the other example acts against the mechanical force to pull the magnets magnetic attraction; the distance must be reduced to reach the same amplitude, which then generates the same output signal as at the lower temperature, provided that the temperature behavior of the sensor is disregarded. Plastic or ceramic materials can be used for the housing. AlNiCo permanent magnets can be mounted on a silicon diaphragm. For miniaturization can be an integrated application-specific micro-system circuit consisting of magnets, a silicon diaphragm and
    StL08 an integrated circuit with integrated Hall sensors are formed. Such a design enables the resource-saving mass production of cost-effective sensors in large quantities with minimal use of different materials and material quantities.
    Typical applications for the sensor are: water level sensors in washing machines, dishwashers or other devices, measuring devices in the production for detecting force or pressure and sensor applications in automobiles. Compared with sensors using a magnet, a spring and a sensor, the presented system is much more robust and achieves linearity errors less than 1%.
    The maximum distance range should be up to 5mm or even more. The maximum pressure or force range and the maximum measurement path depend on the magnetization, the material used and the size and number of permanent magnets as well as the spring used for the zero position.
    StL08.
    权利要求:
    Claims (6)
    [1]
    Method for measuring force or variables derived therefrom, such as pressure, torque, acceleration or weight, wherein at least two permanent magnets, which in the direction of a vector component, in particular substantially in the main direction of acting between them magnetic and distance dependent force or in the direction a vector component, in particular substantially in the main direction of the dependent thereon variable are arranged to be movable relative to each other and wherein at least two magnetic poles forming a gap at a distance, characterized in that, i) at least one of the permanent magnets of each such kind arranged permanent magnet pair of the oppositely acting force to be measured or a variable of the opposite magnitude to be measured, changing the gap, is converted into that distance relative to the associated second magnet of the permanent magnet pair for which the sum of the magnetic forces acting between the pairs of permanent magnets and the mechanically applied counter forces or quantities derived therefrom becomes zero in the direction of mobility, and ii) the measurement-dependent StL08 magnetic field strength due to the distance between the magnets of each Permanent magnet pair is detected in equilibrium by at least one magnetic field sensor within each gap formed by this method as a directly proportional electrical quantity, and iii) that the output signal of each magnetic field sensor required for the determination of the quantity to be measured is converted into a signal processing suitable for the output signal. , Output and / or display device is passed. Device for carrying out the method according to claim 1, characterized in that it i) comprises at least one pair of permanent magnets whose magnets are arranged at a distance from each other and their magnetic pole faces at least approximately parallel to each other and are in an orientation position in which the largest Act attraction forces between the permanent magnets, and ii) a distancing device for maintaining a minimum distance between the pole faces in at least one embodiment of the group spacer plate, spacer sleeve, hollow guide with at least one inner nose, a distance spring preferably a leaf, a cone, a plate, diaphragm, Evolut-, or helical spring has, and iii) a magnetic field sensor between the opposing magnetic pole faces StL08l iv) at least one permanent magnet, a device for counterforce application preferably in the form of a lever or a hydra ulischen or pneumatic pressure chamber is provided.
    [2]
    3. A device for carrying out the method according to claim 1, characterized in that, i) it has at least one pair of permanent magnets whose magnets are arranged at a distance from each other and whose magnetic pole faces are held opposite each other at least approximately parallel by guiding and limiting means and are in an orientation position in which the greatest repulsive forces between the permanent magnets act, and ii) has a magnetic field sensor between the opposing magnetic pole faces.
    [3]
    4. Device according to one of claims 2 or 3, characterized in that the magnetic field sensor is designed in an integrated design as an integrated circuit, preferably with at least one Hall sensor, or at least one magnetic field-dependent resistor preferably made of bismuth or a GMR (Giantmagnetoresistor- ) Structure and preferably formed together with an evaluation circuit. Device according to claim 4, characterized in that the magnets and the integrated circuit are accommodated in a housing by embedding the integrated circuit of at least one pair of permanent magnets and wherein for the device for applying the counterforce at least one connection interface is provided on the housing is.
    [4]
    6. The device according to claim 5, characterized in that the magnets are formed as surface mountings on micromechanical structures (MEMS) preferably membranes and are arranged above and below the integrated circuit and that the magnetic pole faces are larger than the magnetic field sensors, however, a maximum extent of 5mm, preferably 1mm, preferably in the range of ΙΟμπι to lOOpm.
    [5]
    7. Device according to one of claims 2 to 6, characterized in that the device comprises at least two separate from each other a gap pole pairs of at least three permanent magnets which exert magnetic forces in opposite direction of action preferably for the compensation of Gleichfeldunterdrückung or for compensation of errors due to gravitational forces.
    [6]
    8. Device according to one of claims 2 to 7, characterized in that it is part of a two or three-dimensional sensor matrix. StL08
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    同族专利:
    公开号 | 公开日
    AT512463B1|2015-02-15|
    AT512463A3|2014-11-15|
    DE102012101081A1|2013-08-14|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    DE2842140C2|1978-09-28|1982-12-30|Robert Bosch Gmbh, 7000 Stuttgart|Mechanical-electrical pressure transducer|
    DE2946515A1|1979-11-17|1981-05-27|Robert Bosch Gmbh, 7000 Stuttgart|PRESSURE SENSOR WITH HALL IC|
    EP0060859A1|1980-09-20|1982-09-29|Robert Bosch Gmbh|Elektromechanical converter|
    DE8120655U1|1981-07-15|1982-02-18|Robert Bosch Gmbh, 7000 Stuttgart|PRESSURE SENSOR|
    DE3809887A1|1988-03-24|1989-10-05|Teves Gmbh Alfred|Sensor for measuring mechanical motion quantities|
    JPH02218965A|1989-02-20|1990-08-31|Iiosu:Kk|Impact sensor|
    DE4026855C2|1990-08-24|1994-02-03|Siemens Ag|Pressure sensor|
    US5723789A|1994-01-12|1998-03-03|Shannon; E. Paul|Impact responsive sensor|
    DE19703173A1|1997-01-29|1998-07-30|Bayerische Motoren Werke Ag|Acceleration sensor, for vehicles, etc.|
    DE19942363C2|1999-09-04|2002-01-31|Bayerische Motoren Werke Ag|Inductive acceleration sensor|
    US6670805B1|2000-09-22|2003-12-30|Alliant Techsystems Inc.|Displacement sensor containing magnetic field sensing element between a pair of biased magnets movable as a unit|
    NL2001627C2|2007-10-24|2009-04-27|Magnetic Innovations B V|Speed sensor.|CN104864996B|2015-06-03|2017-06-30|苏州桀勇不锈钢制品有限公司|A kind of club dynamometer|
    US20210364335A1|2018-11-30|2021-11-25|Carrier Corporation|Suppression Tank Scale and Level Determination|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE201210101081|DE102012101081A1|2012-02-09|2012-02-09|Method for measuring force and e.g. pressure derived from force, involves conducting output signal into signal processing, outputting and/or display device for determination of magnetic field sensor required for measured variable|
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